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Firefighting Standards - NFPA 318

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NFPA 318

Standard for the Protection of Semiconductor Fabrication Facilities
NFPA 318 - Standard for the Protection of Semiconductor Fabrication Facilities

1.1 Scope. This standard applies to semiconductor fabrication facilities and comparable fabrication processes, including research and development areas in which hazardous chemicals are used, stored, and handled and containing what is herein defined as a cleanroom or clean zone, or both.

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